lain and gits are the obvious choices there, but I'm sure you're already aware of that
alita is one of the most memorable protagonists in the genre, so I recommend the 2 episode battle angel alita ova. if you like it, I strongly recommend reading the 9 vol manga which is much better and goes farther (the ova only covers 2 volumes)
armitage is a pretty iconic figure of the 90's cyberpunk anime peak, so consider giving armitage III a look as well.